A silicon avalanche photodiode for single optical photon counting in the Geiger mode

摘要: Abstract Avalanche photodiodes (APDs) can be used in the so-called Geiger mode to count single optical photons. In this diode is biased above its breakdown voltage. The absorption of a photon initiates avalanche breakdown, which easily detected. Prototypes an area-efficient structure for Geiger-mode dedicated APDs have been designed, fabricated and tested. These structures created within framework project integrate arrays these devices. prototypes counting. They do, however, suffer from afterpulsing, caused by traps originating damage implantation fabrication process.