作者: Wen-Jui Tseng , Kuo-Chung Liu
DOI:
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摘要: A mask management and bar code reading apparatus thereof are disclosed. The method comprises providing a apparatus, scanning on the by transferring scanned information to system, producing box code, moving pod from protective case, sticking pod, inputting data recorded in into an exposure equipment, exposing equipment. includes at least clamping element clamp head disposed read first light source irradiate case increase accuracy of head.