Experimental Study of Multilayer Piezo-magnetic SAW Delay Line for Magnetic Sensor☆

作者: Meriem Elhosni , Sébastien Petit-Watelot , Michel Hehn , Sami Hage-Ali , Keltouma Ait Aissa

DOI: 10.1016/J.PROENG.2015.08.743

关键词:

摘要: Abstract This communication describes an experimental study of multilayer piezo-magnetic acoustic wave devices used as sensors external magnetic fields applied in plane, parallel or perpendicular to the direction propagation direction. The considered device consists a layered structure Mag/ZnO/IDT/LNY-128, Mag being sensitive magnetoelastic layer. Two films are investigated layers: Ni and CoFeB. Their sensitivities field intensity measured compared.

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