作者: Phillip Durdaut , Enrico Rubiola , Jean-Michel Friedt , Cai Muller , Benjamin Spetzler
DOI: 10.1109/JMEMS.2020.3014402
关键词:
摘要: Magnetoelastic sensors for the detection of low-frequency and low-amplitude magnetic fields are in focus research more than 30 years. In order to minimize limit (LOD) such sensor systems, it is high importance understand be able quantify relevant noise sources. this contribution, cantilever-type electromechanical magnetoelastic resonators, respectively, comprehensively investigated mathematically described not only with regard their phase sensitivity but especially extent sensor-intrinsic noise. Both measurements calculations reveal that fundamental LOD limited by additive due thermal-mechanical resonator, i.e. thermally induced random vibrations cantilever, thermal-electrical piezoelectric material. However, losses material parametric flicker arises, limiting overall performance. particular, shown virtually independent solely determined losses. Instead sensitivity, losses, represented material’s effective complex permeability, should considered as most important parameter further improvement future. This implication valid cantilevers also applies any type resonator. [2020-0219]