Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers

作者: Phillip Durdaut , Enrico Rubiola , Jean-Michel Friedt , Cai Muller , Benjamin Spetzler

DOI: 10.1109/JMEMS.2020.3014402

关键词:

摘要: Magnetoelastic sensors for the detection of low-frequency and low-amplitude magnetic fields are in focus research more than 30 years. In order to minimize limit (LOD) such sensor systems, it is high importance understand be able quantify relevant noise sources. this contribution, cantilever-type electromechanical magnetoelastic resonators, respectively, comprehensively investigated mathematically described not only with regard their phase sensitivity but especially extent sensor-intrinsic noise. Both measurements calculations reveal that fundamental LOD limited by additive due thermal-mechanical resonator, i.e. thermally induced random vibrations cantilever, thermal-electrical piezoelectric material. However, losses material parametric flicker arises, limiting overall performance. particular, shown virtually independent solely determined losses. Instead sensitivity, losses, represented material’s effective complex permeability, should considered as most important parameter further improvement future. This implication valid cantilevers also applies any type resonator. [2020-0219]

参考文章(70)
C. D. Graham, B. D. Cullity, Introduction to Magnetic Materials ,(1972)
A. Ludwig, E. Quandt, Optimization of the /spl Delta/E-effect in thin films and multilayers by magnetic field annealing ieee international magnetics conference. ,vol. 38, pp. 2829- 2831 ,(2002) , 10.1109/TMAG.2002.802467
Frederik Labaar, Algie L. Lance, Wendell D. Seal, Phase noise and AM noise measurements in the frequency domain imw. ,vol. 11, pp. 239- 289 ,(1984)
Meriem Elhosni, Sébastien Petit-Watelot, Michel Hehn, Sami Hage-Ali, Keltouma Ait Aissa, Daniel Lacour, Abdelkrim Talbi, Omar Elmazria, Experimental Study of Multilayer Piezo-magnetic SAW Delay Line for Magnetic Sensor☆ Procedia Engineering. ,vol. 120, pp. 870- 873 ,(2015) , 10.1016/J.PROENG.2015.08.743
J Joseph Briaire, 1/f noise in permalloy Technische Universiteit Eindhoven. ,(2000)
R. Boudot, E. Rubiola, Phase noise in RF and microwave amplifiers IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 59, pp. 2613- 2624 ,(2012) , 10.1109/TUFFC.2012.2502
Weiyang Li, Pallavi Dhagat, Albrecht Jander, Surface Acoustic Wave Magnetic Sensor using Galfenol Thin Film IEEE Transactions on Magnetics. ,vol. 48, pp. 4100- 4102 ,(2012) , 10.1109/TMAG.2012.2201928
H. T. Hardner, M. B. Weissman, M. B. Salamon, S. S. P. Parkin, Fluctuation-dissipation relation for giant magnetoresistive 1/f noise. Physical Review B. ,vol. 48, pp. 16156- 16159 ,(1993) , 10.1103/PHYSREVB.48.16156