Pressure-induced solid-state lattice mending of nanopores by pulse laser annealing.

作者: Pei-Hsing Huang , Hsin-Yi Lai

DOI: 10.1088/0957-4484/19/25/255701

关键词:

摘要: This paper presents the pressure-induced solid-state lattice mending of nanopores in single-crystal copper by femtosecond laser annealing processes. The microscopic mechanism is investigated a modified continuum?atomistic modeling approach. Three typical phases, including (i) incubation dislocation nucleation, (ii) plastic deformation under combined effect pressure and atomic thermal diffusion, (iii) recovery reconstruction, are characterized via structure changes transient thermodynamic trajectories. simulation results reveal that structural pore originated heterogeneous nucleation dislocations from surface. shear-induced multiple glides found to significantly contribute nanopore process mending. rates two different modes, classical unsteady-state estimated be very each other, an order 104. In addition, location also influence threshold. Since largest amplitude wave built up at characteristic depth approximately 45?nm below irradiated surface, shock will directly impinge on induce fast if located within lower limit range depth. Furthermore, it interesting note close fluence generally than near These provide vital insights photomechanical interactions with microstructure metallic solid, proposed approach can further considered enhanced predict for various defects future.

参考文章(25)
H-Y Lai, P-H Huang, T-H Fang, None, Microscopic spallation mechanisms induced by a pulse laser at the solid-state interface Applied Physics A. ,vol. 86, pp. 497- 503 ,(2007) , 10.1007/S00339-006-3799-2
Carsten Schäfer, Herbert M. Urbassek, Leonid V. Zhigilei, Metal ablation by picosecond laser pulses: A hybrid simulation Physical Review B. ,vol. 66, pp. 115404- ,(2002) , 10.1103/PHYSREVB.66.115404
Jia-Min Shieh, Zun-Hao Chen, Bau-Tong Dai, Yi-Chao Wang, Alexei Zaitsev, Ci-Ling Pan, Near-infrared femtosecond laser-induced crystallization of amorphous silicon Applied Physics Letters. ,vol. 85, pp. 1232- 1234 ,(2004) , 10.1063/1.1782267
S. O. Kucheyev, J. S. Williams, C. Jagadish, J. Zou, Cheryl Evans, A. J. Nelson, A. V. Hamza, Ion-beam-produced structural defects in ZnO Physical Review B. ,vol. 67, pp. 094115- ,(2003) , 10.1103/PHYSREVB.67.094115
W.-K. Liu, J.-M. Yuan, S. H. Lin, Classical dynamics of multiphoton excitation and dissociation of diatomic molecules by infrared laser pulses Physical Review A. ,vol. 60, pp. 1363- 1370 ,(1999) , 10.1103/PHYSREVA.60.1363
Yoichi Hirayama, Minoru Obara, Heat-affected zone and ablation rate of copper ablated with femtosecond laser Journal of Applied Physics. ,vol. 97, pp. 064903- ,(2005) , 10.1063/1.1852692
Changrui Cheng, Xianfan Xu, Mechanisms of decomposition of metal during femtosecond laser ablation Physical Review B. ,vol. 72, pp. 165415- ,(2005) , 10.1103/PHYSREVB.72.165415
J.J. De Miguel, A. Sánchez, A. Cebollada, J.M. Gallego, J. Ferrón, S. Ferrer, The surface morphology of a growing crystal studied by thermal energy atom scattering (TEAS) Surface Science. ,vol. 189, pp. 1062- 1068 ,(1987) , 10.1016/S0039-6028(87)80550-2
R.T. Hong, M.J. Huang, J.Y. Yang, Molecular dynamics study of copper trench filling in damascene process Materials Science in Semiconductor Processing. ,vol. 8, pp. 587- 601 ,(2005) , 10.1016/J.MSSP.2005.05.001