High sensitivity micro-machined pressure sensors and acoustic transducers

摘要: A method of making a pressure sensor or acoustic transducer having high sensitivity and reduced size. thin sensing diaphragm is produced by growing single crystal, highly doped silicon layer on substrate using chemical vapor deposition process. The incorporated into which detects variations change in the capacitance capacitor includes as movable member. produces sensitive device can be fabricated smaller size than sensors transducers thicker diaphragms.