作者: Lloyd C. Brown , Alexis T. Bell
DOI: 10.1063/1.1681943
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摘要: A mass spectrometric investigation has been performed of the ionic species present during oxidation CO and decomposition CO2 in a rf discharge. The relative ion current for each is found to depend upon discharge power gas pressure. feature particular interest observation that C+ one dominant ions present. An analysis mechanisms formation this suggests it formed by reaction CO+ + → which occurs sheath separating plasma sampling orifice.