LIFETIME MEASURING APPARATUS AND ITS MEASURING METHOD

摘要: PROBLEM TO BE SOLVED: To provide a lifetime measuring apparatus and its method which measures the of semiconductor sample conveniently accurately for short time with high S/N ratio. SOLUTION: A holder is controlled so that 23 located at position 34 or vicinity where field intensity standing wave 25 peak, formed an incident reflected waves detecting electronic 22 reflective board 24. This allows ratio detected by means 29 to be possibly high, thus time. COPYRIGHT: (C)2006,JPO&NCIPI