A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors
作者： T Kobayashi , H Okada , T Masuda , R Maeda , T Itoh
DOI: 10.1088/0964-1726/20/6/065017
关键词:
摘要: The present paper describes the development of a digital output accelerometer composed microelectromechanical systems (MEMS)-based piezoelectric accelerometers and arrayed complementary metal–oxide–semiconductor (CMOS) inverters accompanied by capacitors. were fabricated from multilayers Pt/Ti/PZT/Pt/Ti/SiO2 deposited on silicon-on-insulator (SOI) wafers. connected to CMOS inverters. Each was capacitor with different capacitance called 'satellite capacitor'. We have confirmed that voltage generated can vary high low level; state has turned 'off-state' into 'on-state' when is larger than threshold also satellite become at lower acceleration. On increasing acceleration, number on-state increased. Assuming off-state correspond logic '0' '1', expressed accelerations 2.0, 3.0, 5.0, 5.5 m s − 2 as outputs 111, 110, 100, 000, respectively.
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sci-hub.se 参考文章(23)
Takeshi Kobayashi, Syoji Oyama, Masaharu Takahashi, Ryutaro Maeda, Toshihiro Itoh, Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3 Thin Films Japanese Journal of Applied Physics. ,vol. 47, pp. 7533- 7536 ,(2008) , 10.1143/JJAP.47.7533
Paul Muralt, Recent Progress in Materials Issues for Piezoelectric MEMS Journal of the American Ceramic Society. ,vol. 91, pp. 1385- 1396 ,(2008) , 10.1111/J.1551-2916.2008.02421.X
Andreas Vogl, Dag T. Wang, Preben Storås, Thor Bakke, Maaike M.V. Taklo, Allan Thomson, Lennart Balgård, Design, process and characterisation of a high-performance vibration sensor for wireless condition monitoring Sensors and Actuators A-physical. ,vol. 153, pp. 155- 161 ,(2009) , 10.1016/J.SNA.2009.04.011
Sungsik Lee, Ahra Lee, Chang-Han Je, Myung-Lae Lee, Gunn Hwang, Chang-Auck Choi, 1.5 V Sub-mW CMOS Interface Circuit for Capacitive Sensor Applications in Ubiquitous Sensor Networks Etri Journal. ,vol. 30, pp. 644- 652 ,(2008) , 10.4218/ETRIJ.08.1308.0034
Xiao-hong Du, Jiehui Zheng, Uma Belegundu, Kenji Uchino, Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary Applied Physics Letters. ,vol. 72, pp. 2421- 2423 ,(1998) , 10.1063/1.121373
Takeshi Kobayashi, Ryutaro Maeda, Toshihiro Itoh, Renshi Sawada, Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film Applied Physics Letters. ,vol. 90, pp. 183514- ,(2007) , 10.1063/1.2736296
J. Buckley, B. O'Flynn, J. Barton, S.C. O'Mathuna, A highly miniaturized wireless inertial sensor using a novel 3D flexible circuit Microelectronics International. ,vol. 26, pp. 9- 21 ,(2009) , 10.1108/13565360910981517
Mathieu Hautefeuille, Brendan O’Flynn, Frank Peters, Conor O’Mahony, Miniaturised multi-MEMS sensor development. Microelectronics Reliability. ,vol. 49, pp. 621- 626 ,(2009) , 10.1016/J.MICROREL.2009.02.017
T Kobayashi, R Maeda, T Itoh, A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers Journal of Micromechanics and Microengineering. ,vol. 18, pp. 115007- ,(2008) , 10.1088/0960-1317/18/11/115007
Ali H Nayfeh, Mohammad I Younis, None, Dynamics of MEMS resonators under superharmonic and subharmonic excitations Journal of Micromechanics and Microengineering. ,vol. 15, pp. 1840- 1847 ,(2005) , 10.1088/0960-1317/15/10/008