作者: Galina Kholodnaya , Roman Sazonov , Denis Ponomarev , Fedor Konusov , Ruslan Gadirov
DOI: 10.1080/1536383X.2018.1531851
关键词:
摘要: … For this, silicon tetrachloride, methane and oxygen were introduced … of silicon tetrachloride with the formation of atomic chlorine. Afterwards, titanium tetrachloride, oxygen and hydrogen …