Micromachined high-Q resonators, low-loss diplexers, and low phase-noise oscillators for a 28 GHz front-end
作者： A.R. Brown , G.M. Rebeiz
DOI: 10.1109/RAWCON.1999.810976
关键词:
摘要: This paper presents an alternative method of implementing high-Q resonators using micromachining techniques. Micromachining is used to selectively remove the substrate and suspend conductor patterns result in very low loss structures that are accurately defined with standard photolithography. demonstrates how this technique can be applied filters, diplexers, oscillators at 28 GHz. These components compact, require no manual tuning, fabricated large quantities.
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