System and method for uniformity correction
作者： Eric B. Catey , Richard C. Zimmerman , Roberto B. Wiener , Alexander C. Kremer , David A. Hult
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摘要: A system and method for uniformity correction is provided. The includes a plurality of winged elements inserted into the illumination field in defined configuration. Adjacent are overlapped to minimize induced ripple. Each element has first protrusion on longitudinal edge second opposite edge. slope sloped tied gradient non-uniformity profile field. In addition, angles by flat tip protrusions angle
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