Multi-chamber system provided with carrier units
作者： Masao Kubodera , Masahito Ozawa , Masaki Narushima , Masanobu Kanazashi , Toshihiko Takasoe
DOI:
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摘要: A cassette carrier unit for carrying a cassette, in which plurality of substrates are housed, into and out chambers the multi-chamber system including hand on is mounted. multi-joined arm supports swingable hand, base arm. The includes first shaft member rotatably attached to second base, third rotated associating with but direction reverse rotated, fourth rotation drive force transmitted. at front end thereof thereof. arranged substantially parallel fixed When arms swung, swung swung.
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