An improved interface and noise analysis of a turning fork microgyroscope structure

摘要: Abstract This paper analyzes different noise components in MEMS gyroscope silicon structure, including mechanical–thermal (MTN), electronic-thermal (ETN), flicker (FN) and Coriolis signal in-phase (IPN). The structure equivalent electronic model is established, the improved differential interface proposed based on weak detection technology, after that, are introduced analyzed sense open loop. quadrature error (QE) automatically cancellation loop proposed, results of experiment indicate that angular rates QE IPN 46°/s 4.55°/s respectively. interfaces contrast experiments show DC useful amplitudes single-side −49.8 dBmV, −16.8 dBmV −39.8 dBmV (−42.1 dBmV), −22.1 dBmV (−22.2 dBmV), which confirms has better SNR. carrier also illustrate higher frequency (from 500 kHz to 10 MHz) can restrain −19.8 dBmV −54.2 dBmV) better, demonstrate FN dominant component under normal temperature. temperature enhances from −48.5 dBmV −14.6 dBmV over range 20 °C 60°C while amplitude remains around -16.6dBmV, this phenomenon indicates MTN ETN become gradually with rising.