Optimization and Experimentation of Dual-Mass MEMS Gyroscope Quadrature Error Correction Methods.

摘要: This paper focuses on an optimal quadrature error correction method for the dual-mass MEMS gyroscope, in order to reduce long term bias drift. It is known that coupling stiffness and demodulation are important elements causing The structures analyzed. experiment proves left right masses’ errors different, system should be arranged independently. process leading proposed, Charge Injecting Correction (CIC), Quadrature Force (QFC) Coupling Stiffness (CSC) methods introduced. objects of these three signal, force stiffness, respectively. investigated through control theory analysis, model simulation circuit experiments, results support theoretical analysis. stability based CIC, QFC CSC 48 °/h, 9.9 °/h 3.7 respectively, this value 38 before correction. proved better correction, it improves Angle Random Walking (ARW) value, increasing from 0.66 °/√h 0.21 °/√h. general test show works well across full temperature range, stabilities six groups’ output data 3.8 3.6 3.4 3.1 3.0 4.2 which has excellent repeatability.