Gyro vibration piece, gyro sensor, and method of manufacturing gyro vibration piece

摘要: A gyro vibration piece detecting an angular velocity includes: a supporting part; driving part connected to the and performing vibration; detection through generated by Coriolis force rotation of connection including portion having plurality steps formed between side width direction or another part, which are continuously connected. The has first end is located on innermost among circular arc shaped wall that connects bottom surface predetermined depth.