Manufacture process of quartz vibrator

作者: Nobuyoshi Sugitani , Motohiro Fujiyoshi , Motoyasu Hanji

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摘要: Since etching of a crotch portion quartz vibrator defined by segment 18, first 13, and second 17 advances in accordance with the crystal orientations quartz, shape side surfaces two vibrating bars opposite to each other this between can be made symmetric, whereby stress applied on equalized.

参考文章(1)
Mati Mikkor, Silicon accelerometer responsive to three orthogonal force components and method for fabricating Journal of the Acoustical Society of America. ,vol. 90, pp. 1212- 1212 ,(1989) , 10.1121/1.402003