Method of manufacturing semiconductor device including vibrator which is provided with side insulating film and insulating separation region formed by thermal oxidation
作者： Hironobu Kawauchi
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摘要: A method of manufacturing a semiconductor device includes partially etching the upper surface substrate to form side grooves and expose surfaces vibrators, separation where insulating regions between vibrators are be formed, thermally oxidizing region composed oxidized films filled in grooves, film, performing release using film as mask bottom arranged recess formed substrate.
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