Method of manufacturing physical quantity detector

摘要: An electrode layer is formed on the upper surface of a first substrate, and processing for partially removing substrate carried out in order to allow have flexibility. To lower second connected. Then, by cutting working body pedestal are formed. On other hand, groove third substrate. bottom groove. The connected so that both electrodes face each with predetermined spacing therebetween. Finally, first, substrates cut off every respective unit regions form independent sensors, respectively. When an acceleration exerted body, bends. As result, distance between changes. Thus, detected changes electrostatic capacitance electrodes.