Manufacture of distribution type pressure sensor

摘要: PURPOSE: To obtain a distribution type pressure sensor having high reliability and durability by holding flexible substrate between the first second positioning materials in such state that holes of both are opposed mutually engaging an Si-cell with hole to bond same conductor pattern detection part said cell. CONSTITUTION: An FPC 16 piercing 26 is placed on mesa frame 71 cell 61 superposed position pinholes 66, 76. A engaged 63 glass plate 51 pressed 41 be clamped 61. Laser beam applied from irradiation window 42 weld solder bump electrode 16. The whole turned back 11 73 press 81 through elastomer adhered uniform pressing force clamp screw detached jig also complete sensor. In this thus constituted, all elements have characteristics excellent durability. COPYRIGHT: (C)1990,JPO&Japio