作者: Yih-Guei Wey , K. Giboney , J. Bowers , M. Rodwell , P. Silvestre
DOI: 10.1109/50.400717
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摘要: Long-wavelength GaInAs/InP graded double heterostructure p-i-n photodiodes are demonstrated with 3-dB bandwidths over 100 GHz. The heterojunction hole trapping problem is significantly improved and the device contact resistivity greatly reduced by using superlattice bandgap layers at hetero-interfaces to reduce barrier height. Self-aligned processes used in fabrication parasitics. Pulsewidths as short 3.0 ps full-width-at-its-half-maximum (FWHM) for 2 /spl mu/m/spl times/2 mu/m measured pump-probe electrooptic sampling. GHz found 3 times/3 devices. integrated bias tee can be biased without external tee. electrical resonance between photodiode circuits was integrating an impedance matched resistor parallel photodiode. 7 times/7 has a pulsewidth of 3.8 bandwidth calculated pulse shape based on saturation velocity model fits well response. A different components series resistance agrees area dependence resistance. >