Contrast of Backscattered Electron SEM Images of Nanoparticles on Substrates with Complex Structure
作者： Thomas Kowoll , Erich Müller , Susanne Fritsch-Decker , Simon Hettler , Heike Störmer
DOI: 10.1155/2017/4907457
关键词:
摘要: This study is concerned with backscattered electron scanning microscopy (BSE SEM) contrast of complex nanoscaled samples which consist SiO2 nanoparticles (NPs) deposited on indium-tin-oxide covered bulk and glassy carbon substrates. BSE SEM NPs studied as function the primary energy working distance. Contrast inversions are observed prevent intuitive interpretation NP in terms material contrast. Experimental data quantitatively compared Monte-Carlo- (MC-) simulations. Quantitative agreement between experimental MC-simulations obtained if transmission characteristics annular semiconductor detector taken into account. facilitate understanding helpful to derive conditions for optimum topography
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core.ac.uk参考文章(14)
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