Ion beam synthesis of gold nanoclusters in SiO2: Computer simulations versus experiments
作者： M. Strobel , K.-H. Heinig , W. Möller , A. Meldrum , D.S. Zhou
DOI: 10.1016/S0168-583X(98)00541-2
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摘要: A kinetic 3D lattice Monte-Carlo (KLMC) method is applied to describe nucleation and growth of nanoclusters from a space- time-dependent supersaturated solid solution impurity atoms formed by high-dose ion implantation. Within the framework homogeneous nucleation, dependence nanocluster size distribution on implantation temperature Timp current j shown. The simulation results are consistent with depth distributions gold in SiO2 observed after at different Timp. influence changes or during simulated discussed respect corresponding implantations.
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