Selective drive of electrostatic actuators using remote inductive powering
作者： Shoji Takeuchi , Isao Shimoyama
DOI: 10.1016/S0924-4247(01)00738-5
关键词:
摘要: A remote inductive powering system for driving electrostatic actuators is proposed. The can be controlled selectively by matching transmitter's frequency to the resonance of receiver LC-circuits. 8.5 mm/spl times/7.2 mm square and 20 turns planar coil are used as a coil. maximum output voltage was measured about 45 V when load resistance more than 100 k/spl Omega/. conventional comb actuator prototype system. were fabricated on same surface commercially available silicon insulator (SOI) wafer. displacement changing frequency.
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