摘要: The design of a wireless micro-robot is investigated. robot consists distributed ciliary micro-motion system with electrostatic actuation. Two new types 150/spl times/100 /spl mu/m/sup 2/ actuators have been fabricated thanks to three-level polysilicon process. Remote powering achieved by inductive coupling at 13.56 MHz. A simple analytical model for the developed. 24-/spl mu/m thick electroplated gold antenna has optimized, then on an epoxy film in order obtain light component supported robot. Electronics transceiver and control are also presented.
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