Sputter deposition and characterization of Cd2SnO4 films
作者： G. Haacke , W.E. Mealmaker , L.A. Siegel
DOI: 10.1016/0040-6090(78)90075-5
关键词:
摘要: Abstract Cadmium stannate (Cd2SnO4) films were prepared by r.f. sputtering from Cd2SnO4 powder or cadmium-tin alloy targets. The transparent to visible light and electrically conductive. Their optical transmission electrical conductivity depended on the conditions, post-deposition heat treatment presence of secondary phases (mainly CdSnO3 CdO). influence deposition parameters film composition properties is discussed.
harvard.edu
elsevier.com
sci-hub.se 参考文章(17)
Martin Tr�mel, Die Kristallstruktur der Verbindungen vom Sr2PbO4-Typ Zeitschrift für anorganische und allgemeine Chemie. ,vol. 371, pp. 237- 247 ,(1969) , 10.1002/ZAAC.19693710504
G. Haacke, Transparent electrode properties of cadmium stannate Applied Physics Letters. ,vol. 28, pp. 622- 623 ,(1976) , 10.1063/1.88589
G.K. Wehner, C.E. Kenknight, D. Rosenberg, Modification of the lunar surface by the solar-wind bombardment Planetary and Space Science. ,vol. 11, pp. 1257- 1261 ,(1963) , 10.1016/0032-0633(63)90229-0
Josef Stuke, Die optische Absorptionskonstante von Kadmiumoxyd European Physical Journal. ,vol. 137, pp. 401- 415 ,(1954) , 10.1007/BF01333456
L. I. Maissel, P. M. Schaible, Thin Films Deposited by Bias Sputtering Journal of Applied Physics. ,vol. 36, pp. 237- 242 ,(1965) , 10.1063/1.1713883
G. Haacke, Evaluation of cadmium stannate films for solar heat collectors Applied Physics Letters. ,vol. 30, pp. 380- 381 ,(1977) , 10.1063/1.89439
G. Haacke, H. Ando, W. E. Mealmaker, Spray Deposition of Cadmium Stannate Films Journal of The Electrochemical Society. ,vol. 124, pp. 1923- 1926 ,(1977) , 10.1149/1.2133196
E. Gillam, The penetration of positive ions of low energy into alloys and composition changes produced in them by sputtering Journal of Physics and Chemistry of Solids. ,vol. 11, pp. 55- 67 ,(1959) , 10.1016/0022-3697(59)90041-1
W. G. Spitzer, J. M. Whelan, Infrared Absorption and Electron Effective Mass in n-Type Gallium Arsenide Physical Review. ,vol. 114, pp. 59- 63 ,(1959) , 10.1103/PHYSREV.114.59
M. L. Tarng, G. K. Wehner, Alloy Sputtering Studies with in situ Auger Electron Spectroscopy Journal of Applied Physics. ,vol. 42, pp. 2449- 2452 ,(1971) , 10.1063/1.1660561