Asymmetric Bipolar Plasma Power Supply to Increase the Secondary Electrons Emission in Capacitive Coupling Plasmas
作者： Juliano Sadi Scholtz , Luis Cesar Fontana , Marcello Mezaroba
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摘要: … This paper proposes an asymmetric pulsed bipolar power supply, adjustable in … of pulses for generation of cold plasmas. Short period positive pulses, between longer negative pulses, …
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