Method of detecting particles on panel
作者： Shen Yongqiang , Han Xueshan
DOI:
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摘要: A method for detecting degree of particulate contamination on a flat panel mainly includes the following steps: illuminating to-be-detected (40) by using light source module (10), to form an illumination field; adjusting half width luminous intensity at center field and edge position source, as well detector (20); acquiring signals from foreign objects (20). This greatly alleviates particle mirror crosstalk patterns lower surface panel, improves SNR, thus enhancing accuracy in detection panel.
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