作者: Jacobus Hermanus Maria Neijzen , Johannes Joseph Hubertina Barbara Schleipen
DOI:
关键词:
摘要: The invention relates to a detection apparatus (1) for detecting particles on or close surface (5) in first optical mode and second mode, wherein component of light system (8) and/or an (9) the is arranged be used mode. Since this does not need provided twice, i.e. being This can lead reduced number components make technically less complex.