Surface acoustic wave resonator with an open circuit grating for high temperature environments
作者： Bennett Meulendyk , Mauricio Pereira da Cunha
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摘要: Surface acoustic wave resonators for use in high temperature applications including a piezoelectric substrate, at least one interdigital transducer supported by the and grating reflector being fabricated of heavy metal comprising plurality electrodes, electrode electrodes electrically isolated from other electrode. Methods making surface are also included.
lens.org 参考文章(16)
Junya Nishii, Takanori Ikuta, Tetsuya Kishino, Michiaki Nishimura, Hiroyuki Tanaka, Masahisa Shimozono, Kyohei Kobayashi, Kenji Yamamoto, Acoustic wave element and acoustic wave device using same ,(2012)
Seiichi Mitobe, Koichi Wada, Shogo Inoue, Surface acoustic wave apparatus ,(2006)
Mauricio Pereira da Cunha, Surface acoustic wave devices for high temperature applications ,(2005)
Mauricio Pereira da Cunha, Surface acoustic wave sensor Journal of the Acoustical Society of America. ,vol. 120, pp. 2397- ,(2003) , 10.1121/1.2395087
B. J. Meulendyk, M. Pereira da Cunha, Suppression of transverse waveguide modes for SAW resonators with Pt and Pt/Rh/ZrO 2 electrodes internaltional ultrasonics symposium. pp. 2810- 2813 ,(2009) , 10.1109/ULTSYM.2009.5441767
William R. Shreve, Surface acoustic wave resonator incorporating coupling transducer into reflecting arrays ,(1976)
Mauricio Pereira da Cunha, Thomas Moonlight, George Paul Bernhardt, David Joseph Frankel, Robert J. Lad, Ultra-thin film electrodes and protective layer for high temperature device applications ,(2007)
David Penunuri, Method and apparatus for acoustic wave inductance ,(1992)
Joshua Zepess, Gary Monetti, Svetlana Malocha, Benjamin Abbott, Jack Chocola, Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics ,(2003)
Kazunobu Shimoe, Surface acoustic wave resonator filter with a weighted asymmetrical interdigital electrode ,(1997)