Shear horizontal surface acoustic wave (SH-SAW) resonators and arrays thereof
作者： Darren W. Branch , Thayne L. Edwards
DOI:
关键词: Acoustics 、 Electrode 、 Resonator 、 Reflector (antenna) 、 Biosensor 、 Shear horizontal 、 Surface acoustic wave 、 Mechanical energy 、 Acoustic cavity 、 Materials science
摘要: The present application relates to a biosensor that employs an acoustic cavity store mechanical energy. In particular examples, the includes electrode region and one or more reflector regions form cavity, as well functionalized active area disposed in proximity cavity. Methods of making using such biosensors are also described herein.
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