Method for forming conductive structures
作者： Stephan Grunow , Richard Paul Volant , Kevin Shawn Petrarca , Kaushik A. Kumar
DOI:
关键词:
摘要: A method of forming a conductive wire. The includes dielectric hardmask layer on layer; an electrically the trench extending through and layers into depositing liner/seed sidewalls bottom trench; filling with fill material; removing from top surface material electroplating metal onto exposed surfaces so edges are coplanar layer.
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