Vertical probe card
作者： Kazumasa Okubo , Hiroshi Iwata , Masao Okubo
DOI:
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摘要: Purpose: To present a vertical probe card capable of reusing without replacing broken if is broken. Constitution: A having probes 100 , being used in measurement electric characteristics an LSI chip 610 to be measured, comprising main substrate 300 forming conductive patterns 310 plurality drooping vertically from the and support 200 provided at back side for supporting which disposed parallel has upper guide plate 210 lower 220 by passing through-holes 211,221 opened each, composed three substrates A, B, C laminated separably.
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