Preparation and characterization of La2O3 doped diamond-like carbon nanofilms (I): Structure analysis
作者： Zhenyu Zhang , Xinchun Lu , Jianbin Luo , Yang Liu , Chenhui Zhang
DOI: 10.1016/J.DIAMOND.2007.07.022
关键词:
摘要: Abstract Twelve La2O3 doped diamond-like carbon (DLC) nanofilms were deposited using unbalanced dual-magnetron sputtering. AFM, XRD, Raman spectroscopy, AES, XPS, and TEM employed to investigate the films. The results show that is formed on surface in inner of DLC spectra exhibit obvious amorphous character. XRD HRTEM indicate films are amorphous, dissolved distributed matrix. While, when content attains 10%, nanocrystalline grain with a diameter about 2 nm observed, Fourier transformation spectroscopy also displays cryatalline
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