Nano- and microstructure of diamond-like carbon films modified by Ca-O incorporation
作者： Annett Dorner-Reisel , Christian Schürer , Volker Klemm , Gert Irmer , Eberhard Müller
DOI: 10.1016/S0925-9635(02)00293-5
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摘要: Abstract In the present study, nano- and microstructure of diamond-like carbon (DLC) coatings on Ti6Al4V substrates were changed by Ca–O incorporation. For deposition Ca–O-DLCs, a gaseous hydrocarbon precursor (e.g. methane) CaO–H2O vapour decomposed together in plasma using direct current discharge. The hardness, Young's modulus relative elastic recovery Ca–O-modified DLCs are reduced comparison to unmodified DLC. However, adherence Ca–O-DLCs is improved. With increasing partial pressure during DLC coating deposition, size sp2-hybridised islands, which observed via high-resolution transmission electron microscopy, increased shape from oval islands strips several 10 nm. This finding good accordance with results Raman spectroscopy, also pointed an increase and/or number crystalline clusters amorphous matrix. have oxygen content due decomposition vapour, addition hydrocarbon. As detected IR X-ray photoelectron Ca incorporated as carbonate into
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