FEM analysis of the vibrational motion of oblique piezoelectric microcantilever in the vicinity of a sample surface in liquid

摘要: Abstract This article examines an oblique Microcantilever (MC) with extended piezoelectric layer in liquid. The study of hydrodynamic force MC which has been floated viscous fluid is considered as paramount importance. To model the Vibrational motion, Hamilton's principle used. For this purpose, motion equation modeled by considering continuous beam based on Euler–Bernoulli theory Furthermore, using Galerkin method and Newmark algorithm, differential equations solved. In modeling, inter-atomic forces between tip sample surface have addition to squeeze forces. simulation results illustrate a reduction sensitivity vibrational under effect during angularization MC. Moreover, that reducing distance from surface, Vibration amplitude decreases due increase force. At end, it shown time delay topography liquid substantially comparison air.