Hydrogen plasma induced defects in silicon
作者： S. J. Jeng , G. S. Oehrlein , G. J. Scilla
DOI: 10.1063/1.99810
关键词:
摘要: … The effect of hydrogen on the properties of single-crystal silicon has become an important … of hydrogen can diffuse into sHicon during various hydrogen plasma treatments, Hydrogen is …
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