Microfabricated filter and capsule using a substrate sandwich
作者： Mauro Ferrari , Jay Kuang-Jieh Tu
DOI:
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摘要: A microfabricated filter made up of two bonded substrate structures, each consisting single crystalline silicon can optionally be formed into a capsule. The pores the consist one or more channels disposed between structures. width are defined by thickness sacrificial layer on includes having precisely controlled pore which may as small 5 nanometers. provides relatively high mechanical strength relative to filters polycrystalline structures and also has throughput modified have resistance adsorption particles.
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