Microstructure changes of Ti-Al-C films deposited by filtered cathodic vacuum arc
作者： Xianjuan Pang , Xiaoqiang Liu , Bo Jin
DOI: 10.1155/2014/286484
关键词:
摘要: Nanocomposite Ti-Al-C films were deposited by filtered cathodic vacuum arc (FCVA) at different CH4 flows. The characterized in terms of elemental and phase compositions, chemical bonds, texture as a function flow rate XRD, XPS, HRTEM, Raman spectroscopy, IR spectroscopy. results show that the TiC grain size decreases from 4.2 to 2.9 nm increases 30 80 sccm. analysis spectroscopy shows microstructure turns dominant TiC-C film carbon network TiAl-doped a-C structure sccm most hydrogen atoms are bonded sp3-hybridized C atoms. All composition change can be explained considering plasma conditions effect flow.
hindawi.com
acm.org参考文章(20)
Jinlong Jiang, Hao Huang, Qiong Wang, Weijun Zhu, Junying Hao, Weimin Liu, Comparative study on structure and properties of titanium/silicon mono‐ and co‐doped amorphous carbon films deposited by mid‐frequency magnetron sputtering Surface and Interface Analysis. ,vol. 46, pp. 139- 144 ,(2014) , 10.1002/SIA.5361
Huili Wang, Sam Zhang, Yibin Li, Deen Sun, Bias effect on microstructure and mechanical properties of magnetron sputtered nanocrystalline titanium carbide thin films Thin Solid Films. ,vol. 516, pp. 5419- 5423 ,(2008) , 10.1016/J.TSF.2007.07.022
Hongxuan Li, Tao Xu, Jianmin Chen, Huidi Zhou, Huiwen Liu, Preparation and characterization of hydrogenated diamond-like carbon films in a dual DC-RF plasma system Journal of Physics D. ,vol. 36, pp. 3183- 3190 ,(2003) , 10.1088/0022-3727/36/24/014
Hong-xi Liu, Xiao-feng Wang, Lang-ping Wang, Bao-yin Tang, Rolling contact fatigue and mechanical properties of titanium carbide film synthesized on bearing steel surface Surface & Coatings Technology. ,vol. 201, pp. 6606- 6610 ,(2007) , 10.1016/J.SURFCOAT.2006.09.105
J Robertson, Diamond-like amorphous carbon Materials Science & Engineering R-reports. ,vol. 37, pp. 129- 281 ,(2002) , 10.1016/S0927-796X(02)00005-0
Xing-zhao Ding, B.K. Tay, H.S. Tan, S.P. Lau, W.Y. Cheung, S.P. Wong, Preferential orientation of titanium carbide films deposited by a filtered cathodic vacuum arc technique Surface & Coatings Technology. ,vol. 138, pp. 301- 306 ,(2001) , 10.1016/S0257-8972(00)01140-3
YAOHUI WANG, XU ZHANG, XIANYING WU, HUIXING ZHANG, XIAOJI ZHANG, EFFECT OF FILTER COIL CURRENT ON PROPERTIES OF nc-TiC/a-C:H NANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE Surface Review and Letters. ,vol. 14, pp. 1143- 1148 ,(2007) , 10.1142/S0218625X0701072X
Douglas E. Wolfe, Jogender Singh, Titanium carbide coatings deposited by reactive ion beam-assisted, electron beam–physical vapor deposition Surface and Coatings Technology. ,vol. 124, pp. 142- 153 ,(2000) , 10.1016/S0257-8972(99)00644-1
Xianjuan Pang, Lei Shi, Peng Wang, Yanqiu Xia, Weimin Liu, Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering Current Applied Physics. ,vol. 11, pp. 771- 775 ,(2011) , 10.1016/J.CAP.2010.11.060
Peng Wang, Xia Wang, Youming Chen, Guangan Zhang, Weimin Liu, Junyan Zhang, The effect of applied negative bias voltage on the structure of Ti-doped a-C:H films deposited by FCVA Applied Surface Science. ,vol. 253, pp. 3722- 3726 ,(2007) , 10.1016/J.APSUSC.2006.08.003