Precise monitor etalon calibration technique
作者： Wolfgang Zschocke , Uwe Stamm , Hans-Stephan Albrecht
DOI:
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摘要: A method for operating an excimer or molecular fluorine laser system at a stabilized wavelength includes generating beam and directing portion through measurement system, calibrating the to absolute reference, determining of including figuring in drift compensation value wavelength, tuning target when determined differs from wavelength.
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