Narrow-spectrum laser device
作者： Shinji Nagai , Takahito Kumazaki , Takayuki Yabu , Koji Kakizaki , Osamu Wakabayashi
DOI:
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摘要: A spectral purity range (E95) of a laser beam output from an amplifying device (300) is measured by measuring means. To have the within allowable E950±dE95 target (E950), discharge timing time when started oscillating (100) to controlled, and controlled be stabilized.
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