Gas discharge mopa laser spectral analysis module

摘要: A spectral analysis module, including a wavemeter, for high repetition rate gas discharge laser having output beam comprising pulsed of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses femptometer precision and tens femptometers accuracy range, measuring on pulse basis at rates 4000 Hz above, is disclosed which may comprise primary beam-splitter in the path operative pass vast majority reflect first small portion beam, splitter oriented an angle sufficiently reduce fluence beam-splitter, creating overlapping fresnel reflections beam; secondary made from material damage threshold tolerate created by reflecting passing second telescoping optic demagnify onto stage diffuser receiving demagnified demagnification selected keep below diffuser. The long axis more short redistributing across any exceeding made. be reflected into power detection module. narrow cone focused before enters interferometer.