Atmospheric microwave-induced plasmas in Ar/H2 mixtures studied with a combination of passive and active spectroscopic methods

摘要: Several active and passive diagnostic methods have been used to study atmospheric microwave-induced plasmas created by a surfatron operating at frequency of 2.45 GHz with power values between 57 88 W. By comparing the results each other, insight is obtained into essential plasma quantities, their radial distributions reliability methods. Two laser techniques used, namely Thomson scattering for determination electron density, ne, temperature, Te, Rayleigh heavy particle Tg. In combination, three spectroscopic are applied, line broadening Hβ determine two absolute intensity measurements obtain ne Te. The provide spatial resolution in small sizes order 0.5 mm. measured different show good agreement, independent settings. Te agreement condition pure argon plasma, but they deviations when H2 introduced. introduction amount (0.3%) an induces contraction, reduces increases enhances departure from equilibrium leads conditions that close those found cool plasmas.