Thomson scattering measurements on a low pressure surface wave sustained plasma in argon

作者: N de Vries , J M Palomares , W J van Harskamp , E I Iordanova , G M W Kroesen

DOI: 10.1088/0022-3727/41/10/105209

关键词:

摘要: Thomson scattering (TS) experiments have been made on a low pressure surfatron induced plasma. TS is an active diagnostic method and the experimental results are directly related to important plasma properties such as electron density, ne, temperature, Te. Therefore, for ne Te can be used calibrate passive methods which often based models. However, apply inside quartz tube experimentally demanding because of large amount stray light intensity signal. To achieve detection limits high rejection, triple grating spectrograph was in branch iCCD record spectrum. For typical condition with argon 10 mbar absorbed power 50 W, measured density found equal ≈ 4 × 1019 m−3 temperature 1.2 eV. In addition, frame-averaged 6, 10, 15 20 mbar plasmas microwave powers between 25 ≤ Pab 60 W presented. The trends dependence according theory.

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