Nanometer-thick copper films grown by thermal atomic layer deposition
作者： Zhenyu Zhong , Xiuqin Wang , Jianning Ding , Ningyi Yuan
DOI: 10.1016/J.TSF.2015.06.053
关键词:
摘要: … of copper, it has been of great interest as a conducting material to replace aluminum in … Compared to thicker films, the electrical properties of nanometer-thick films were found to be …
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