THIN FILM FORMING APPARATUS

摘要: PROBLEM TO BE SOLVED: To provide a thin film forming apparatus which is capable of clearly observing the state substrate by preventing deposits from falling onto viewport. SOLUTION: The equipped with growth chamber 1 holding 31 inside. viewport 5 fitted to 1. An infrared radiation thermometer 6 arranged outside 1, and temperature located inside can be measured through 5. A shutter 11 moving horizontal in position point at screened internal space 1a another set open vice versa. so structured as enable 50 deposited on removed 1a. COPYRIGHT: (C)2004,JPO