Two layer mirror for LCD-on-silicon products and method of fabrication thereof
作者： Yung-Tao Lin , Sik On Kong
DOI:
关键词:
摘要: A method of fabricating an LCD-on-silicon pixel device, comprising the following steps. substrate having upper layer silicon is provided. via formed in layer. An opaque conducting deposited over layer, filling via. The planarized a reflective Alternatively, may be by deposition and etch back process with one metal. then before comprises has plug therein comprised material. Over planar
lens.org 参考文章(12)
Pawan Gogna, Peter J. Janssen, Reflective liquid crystal display having integral light shielding ,(1998)
Rama I. Hegde, Robert W. Fiordalice, Dave Kolar, Process for fabricating a collimated metal layer and contact structure in a semiconductor device ,(1994)
Robert Lee Melcher, James Louis Speidell, Frank Benjamin Kaufman, James Mckell Edwin Harper, Evan George Colgan, Margaret Paggi Manny, Reflective spatial light modulator array ,(1996)
Kalluri R. Sarma, Polysilicon pixel electrode ,(1993)
Kevin Carl Brown, Paul McKay Moore, Richard Luttrell, Silicon interconnect passivation and metallization process optimized to maximize reflectance ,(1998)
Sailesh M. Merchant, Pradip K. Roy, Arun K. Nanda, Multiple layer tungsten deposition process ,(1994)
Dong-Gyu Kim, Byoung-Sun Na, Liquid crystal display device fabrication methods with reduced numbers of patterning steps ,(1996)
Osamu Koyama, Katsumi Kurematsu, Koichi Yamagishi, Toru Nakazawa, Matrix substrate, liquid crystal display device using it, and method for producing the matrix substrate ,(2002)
Yoshio Nakamura, Tetsunobu Kouchi, Shigeki Kondo, Mamoru Miyawaki, Method of manufacturing an image display device with reduced cell gap variation ,(1995)