Thermal-Piezoresistive Resonators and Self-Sustained Oscillators for Gas Recognition and Pressure Sensing
作者： Xiaobo Guo , Yun-bo Yi , Siavash Pourkamali
DOI: 10.1109/JSEN.2013.2258667
关键词:
摘要: This paper presents experimental and theoretical investigation of the response microscale dual-plate thermal-piezoresistive resonators (TPRs) self-sustained oscillators (TPOs) to different gases pressures. It is demonstrated that resonant frequency such devices follow particular trends in changes surrounding gas its pressure. A mathematical model derived explain damping dependent shift characteristic TPO. The solution indicates stiffness actuator beam decreases as value coefficient drops at lower density caused by change molecular mass or When operated TPR mode (linear operation), however, same silicon structure mainly a function thermal conductivity. two sensing mechanisms are confirmed measurement results showing opposite for TPO helium-nitrogen mixtures. In pressure tests, shifts high -2300 ppm measured changing air from 84 43 kPa.
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