Chebyshev Freeform Microlens Array Homogenizer for Excimer Laser Beam Shaping

摘要: A novel design technique of microlens optical beam homogenizing system for excimer lasers is presented. As a new approach by applying Chebyshev freeform surface array, the homogenizer can yield somehow superior shaping results with larger but less units than conventional method, while diffraction effects at apertures be reduced substantially. With this concept and design, large scale highly uniform profile generated relative nearby working distance after shaping, which hard to achieve methods.