Microlens beam homogenizer for excimer laser processing
作者： Yuhua Jin , Yan Zhao , Yijian Jiang
DOI: 10.2351/1.4944448
关键词:
摘要: This paper reports the results of developed microlens beam homogenizer for 248 nm excimer laser. Excimer laser has a complex irradiance profile, and it is difficult to design this kind light source. We present method according propagation properties profile. Since intensity distribution image raw can be photographed by analyzer, we use matlab analyze extract relevant information calculate. With calculated data, simulate virtual source which same profile as initial beam. According energy spatial characteristics source, designed. The designed been fabricated tested. Measurements presented compared ideal design. After shaping homogenization, highly uniform ...
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